Inventor
Shintaro Kogura
Inventor
Toyama, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material30%
H01LSemiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
LOC134%
PatentTitleYear
10,287,680Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium201910,096,463Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium201810,081,868Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium201810,066,294Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium201810,036,092Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium20189,496,134'Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device'20169,340,872'Cleaning method, manufacturing method of semiconductor device, substrate processing apparatus, and recording medium'2016D0610559'Reaction tube'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2019Patents assigned to HITACHI INT ELECTRIC INC (8)· patent assignee history
2010–2019Based in Toyama, JP· patent location history
2016Patents assigned to KOGURA SHINTARO (1)· patent assignee history
2016Patents assigned to SASAKI SHINYA (1)· patent assignee history
2016Patents assigned to TAKEBAYASHI YUJI (1)· patent assignee history
2019Patents assigned to KOKUSAI ELECTRIC CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 8 | 2010–2019 |
| KOGURA SHINTAROself | 1 | 2016 |
| KOKUSAI ELECTRIC CORP | 1 | 2019 |
| SASAKI SHINYA | 1 | 2016 |
| TAKEBAYASHI YUJI | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Toyama, JP | 8 | 2010–2019 |