Inventor
CHUNG-HSUN LI
Inventor
NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
G05BControl or regulating systems in general18%
Y02PClimate change mitigation technologies in the production or processing of goods18%
G06FElectric digital data processing12%
G01BMeasuring length, thickness or similar linear dimensions6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
H01LSemiconductor devices6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
12,204,252Method for decision making in a semiconductor manufacturing process202511,977,034Methods and apparatus for measuring a property of a substrate202411,774,861Calibration method for a lithographic system202311,774,869Method and system for determining overlay202311,687,007Method for decision making in a semiconductor manufacturing process2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2023–2025Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2023–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 5 | 2023–2025 |