Inventor
Dale L. Hetherington
Inventor
Albuquerque, NM, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems33%
Y10TTechnical subjects covered by former us classification22%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry11%
B01LChemical or physical laboratory apparatus for general use11%
B82YSpecific uses or applications of nanostructures11%
G02BOptical elements, systems or apparatus11%
PatentTitleYear
7,004,198'Micro-fluidic interconnect'20066,808,952'Process for fabricating a microelectromechanical structure'20045,998,298'Use of chemical-mechanical polishing for fabricating photonic bandgap structures'19995,919,548'Chemical-mechanical polishing of recessed microelectromechanical devices'19995,804,084'Use of chemical mechanical polishing in micromachining'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2006Patents assigned to SANDIA CORP (5)· patent assignee history
1998–2006Based in Albuquerque, NM, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SANDIA CORP | 5 | 1998–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Albuquerque, NM, US | 5 | 1998–2006 |