Inventor
Abdullah Alikhan
Inventor
Danbury, CT, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
B82YSpecific uses or applications of nanostructures21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests21%
PatentTitleYear
9,977,351Patterning device support, lithographic apparatus, and method of controlling patterning device temperature20189,766,557'Patterning device support, lithographic apparatus, and method of controlling patterning device temperature'20179,632,434'Reticle cooling system in a lithographic apparatus'20179,632,433'Patterning device support, lithographic apparatus, and method of controlling patterning device temperature'20178,446,570'System and method for using a two part cover and a box for protecting a reticle'20137,830,497'System and method for using a two part cover and a box for protecting a reticle'20107,304,720'System for using a two part cover for protecting a reticle'20077,209,220'System for using a two part cover for and a box for protecting a reticle'20076,906,783'System for using a two part cover for protecting a reticle'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2018Patents assigned to ASML HOLDING NV (9)· patent assignee history
2005–2013Based in Danbury, CT, US· patent location history
2013Patents assigned to ALIKHAN ABDULLAH (1)· patent assignee history
2013Patents assigned to DEL PUERTO SANTIAGO (1)· patent assignee history
2013Patents assigned to FEROCE JONATHAN H (1)· patent assignee history
2017–2018Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2017–2018Based in Wilton, CT, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML HOLDING NV | 9 | 2005–2018 |
| ASML NETHERLANDS BV | 4 | 2017–2018 |
| ALIKHAN ABDULLAHself | 1 | 2013 |
| DEL PUERTO SANTIAGO | 1 | 2013 |
| FEROCE JONATHAN H | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Danbury, CT, US | 5 | 2005–2013 |
| Wilton, CT, US | 4 | 2017–2018 |