LexDanaLexDanabeta
Inventor

Sheri A. Durgin

Inventor
Salem, MA, US

Overview

2→
Patents
2017
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H05HPlasma technique25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
9,807,864'Electrode, accelerator column and ion implantation apparatus including same'20179,558,975'System and method for transferring articles between vacuum and non-vacuum environments'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (2)· patent assignee history
2017Based in Salem, MA, US· patent location history
2017Based in Woburn, MA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC22017
Locations
LocationPatentsSpan
Salem, Massachusetts, US12017
Woburn, Massachusetts, US12017