Inventor
Emily Yixie Shu
Inventor
Shanghai, CN
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices12%
F23NRegulating or controlling combustion10%
F23RGenerating combustion products of high pressure or high velocity, e.g. gas-turbine combustion chambers8%
G02BOptical elements, systems or apparatus8%
H05GX-ray technique8%
F23DBurners6%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them6%
H01LSemiconductor devices6%
F01DNon-positive displacement machines or engines, e.g. steam turbines4%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
PatentTitleYear
9,706,632'EUV light source and exposure apparatus'20179,665,017'Method for reducing contamination in extreme ultraviolet lithography light source'20179,176,400'System and method for reducing contamination in extreme ultraviolet lithography light source'20159,054,021'Transistors and fabrication method'20159,049,774'EUVL light source system and method'20158,929,051'Apparatus and method for holding a wafer'20158,917,489'Apparatus and method for holding a wafer'20147,759,024'Controlling shape of a reticle with low friction film coating at backside'20106,978,074'Fiber optic sensors for gas turbine control'20056,842,227'Fusion attachment of rigid pellicles and/or frames'20056,842,228'Fusion attachment of rigid pellicles and/or frames'20056,834,549'Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array'20046,599,028'Fiber optic sensors for gas turbine control'20036,486,487'Apparatus and method for measuring and selectively adjusting a clearance'20026,279,400'Apparatus and method for measuring and selectively adjusting a clearance'20015,978,525'Fiber optic sensors for gas turbine control'19995,936,718'Method for detecting fiber misalignment in composite manufacturing'19995,608,515'Double window for protecting optical sensors from hazardous environments'19975,580,741'Chemiluminescence immunoassay for chlorinated aromatic compound detection'19965,569,911'Fiber optic system for remote fluorescent sensing using excitation and return fibers'19965,544,478'Optical sensing of combustion dynamics'19965,290,398'Synthesis of tapers for fiber optic sensors'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994–2005Patents assigned to GEN ELECTRIC (11)· patent assignee history
1994–1997Based in Schenectady, NY, US· patent location history
1996–2005Based in Niskayuna, NY, US· patent location history
2001–2005Based in San Jose, CA, US· patent location history
2004–2010Patents assigned to INTEL CORP (4)· patent assignee history
2010Based in Santa Clara, CA, US· patent location history
2014–2015Patents assigned to SEMICONDUCTOR MFG INT CORP (3)· patent assignee history
2014–2017Based in Shanghai, CN· patent location history
2015Patents assigned to SEMICONDUCTOR MFG INT SHANGHAI (2)· patent assignee history
2017Patents assigned to SEMICONDUCTOR MFG INT SHANGHAI CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GEN ELECTRIC | 11 | 1994–2005 |
| INTEL CORP | 4 | 2004–2010 |
| SEMICONDUCTOR MFG INT CORP | 3 | 2014–2015 |
| SEMICONDUCTOR MFG INT SHANGHAI | 2 | 2015 |
| SEMICONDUCTOR MFG INT SHANGHAI CORP | 2 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shanghai, CN | 7 | 2014–2017 |
| Niskayuna, New York, US | 7 | 1996–2005 |
| San Jose, California, US | 5 | 2001–2005 |
| Schenectady, New York, US | 2 | 1994–1997 |
| Santa Clara, California, US | 1 | 2010 |