organic materials, such as organic polymer resist layers, are removed from substrates by contacting the materials with a mixture consisting essentially of an alkali metal persulfate and concentrated (96%) sulfuric acid wherein the mixture contains from above about 13 to about 50 grams of alkali metal persulfate per 100 milliliters of sulfuric acid.

Classifications

5 codes

IPC · International Patent Classification

Section G — Physics

G03F7/42

Section H — Electricity

H05K3/06
H10P95/00

USPC · US Patent Classification

134/3134/38

Claim changes

Soon

Coming soonHow the claims changed between publication and grant

See which claims were amended, added or cancelled during examination, with every added and removed word marked.

AmendedAddedCancelledUnchanged

The published claims of this patent are not paired with the granted ones in what we hold.

File wrapper

Pendency

0.6 y

235 days filing → grant

Office actions

on the grant's record

Law firm

Law firm · Log in to unlock

Citations: 0 back · 0 forward

Term & fees

See the term timeline — pendency span, in-force span, the maintenance fees paid and both computed expiry dates.

Worldwide family

5 members · 4 offices

this patentIP5 & PCTother officessolid = grantedhover for detail · click to open

Members

DOCDB simple family 24987844

Offices

US · JP

Granted

2 of 5

grant date present

Non-English titles

shown as filed, never translated

›IP5 & PCT — 2 members

Office	Publication	Kind	Published	Filed	Status	Title
USthis patent	US-T973008-I4	I4	1 Aug 1978	9 Dec 1977	granted	Method for removing layers of organic material
JP	JP-S5364769-A	A	9 Jun 1978	19 Oct 1977	published	Method of removing organic material

›Other offices — 3 members

Office	Publication	Kind	Published	Filed	Status	Title
DE	DE-2747669-A1	A1	24 May 1978	25 Oct 1977	published	Verfahren zum abloesen einer organischen schicht von einem substratde
FR	FR-2371705-A1	A1	16 Jun 1978	7 Oct 1977	published	Photoresist removal from semiconductor - using persulphate and conc. sulphuric acid, avoiding harmful side-effects and need for special precautions
FR	FR-2371705-B1	B1	19 Dec 1980	7 Oct 1977	granted	no title held

Validity challenges

See the validity challenges on record — reexaminations, IPRs and PGRs, with their institution decisions and outcomes.

Citations

See every patent this one cites and every patent that cites it back — publication, assignee, and how each one was found.