Rotary tool for boat of semiconductor manufacturing apparatus
Granted 19 May 2020 · no office action yet
Current assignee: Hitachi Kokusai Electric Inc. · originally Kokusai Electric Co. Ltd.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Satoshi Fujii · Examiner: Nathaniel D. Buckner · AU 2921 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front, top and right…
FIG. 1 is a front, top and right side perspective view of a rotary tool for boat of semiconductor manufacturing apparatus showing my new design;
FIG. 2 is a rear, bottom and left side perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a top plan view thereof; and,
FIG. 8 is a bottom plan view.
Claims
1 · 1 independent · depth 1Classifications
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D884757-S | S1 | 19 May 2020 | 17 Jan 2018 | granted | Rotary tool for boat of semiconductor manufacturing apparatus |
| JP | JP-1596897-S | S | 5 Feb 2018 | 25 Jul 2017 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D192485-S | S | 21 Aug 2018 | 28 Nov 2017 | published | Rotator for substrate processing apparatuszh |
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