Gas supply plate for semiconductor manufacturing apparatus

FIG. 1 is a perspective view of a gas supply plate for semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged view of the portion labeled “ FIG. 8 ” indicated in FIG. 6 ;

FIG. 9 is an enlarged view of the portion labeled “ FIG. 9 ” indicated in FIG. 7 ; and,

FIG. 10 is a cross sectional view taken along line 10 - 10 in FIG. 9 .

The even dashed broken lines shown in the drawings represent portions of the gas supply plate for semiconductor manufacturing apparatus that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary between the claimed portions and unclaimed portions of the claimed design. The claimed portion is directed to the solid circles shown within the dashed-dot-dashed lines, which appear at the center region of the gas supply plate.