Electrode plate for a plasma processing apparatus
Granted 3 Dec 2019 · no office action yet
Current assignee: Hitachi High-Tech Instruments Co., Ltd · originally Hitachi, Ltd.
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Attorney: Attorney · Log in to unlock
Inventors: Masahito Mori, Masakazu Isozaki, Takahisa Hashimoto, Takao Arase +1 · Examiner: Susan Bennett Hattan · AU 2924 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›This application contains subject matter related to the…
This application contains subject matter related to the following co-pending U.S. design patent applications:
Application Ser. No. 29/635,289, filed herewith and entitled “Gas Ring for a Plasma Processing Apparatus”;
Application Ser. No. 29/635,292, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”; and
Application Ser. No. 29/635,296, filed herewith and entitled “Electrode Plate Peripheral Ring for a Plasma Processing Apparatus”.
FIG. 1 is a front, bottom and right side perspective view of an electrode plate for a plasma processing apparatus according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a rear elevational view thereof;
FIG. 8 is a cross-sectional view taken along line 8 - 8 of FIG. 2 ;
FIG. 9 is an enlarged view of the portion shown in box 9 in FIG. 8 ; and,
FIG. 10 is an enlarged view of the portion shown in box 10 in FIG. 2 .
The broken lines show the boundaries of the enlarged portions illustrated in FIG. 9 and FIG. 10 and form no part of the claimed design.
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D868993-S | S1 | 3 Dec 2019 | 30 Jan 2018 | granted | Electrode plate for a plasma processing apparatus |
| JP | JP-1598996-S | S | 5 Mar 2018 | 31 Aug 2017 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D193613-S | S | 21 Oct 2018 | 31 Jan 2018 | published | Electrode plate for plasma processing devicezh |
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