FIG. 5 is an exploded view thereof, with portions of the thermal cover elevated from the remainder of the chemical vapor deposition wafer carrier with thermal cover.

FIG. 6 is a bottom perspective view thereof; and,

FIG. 7 is a perspective view of the thermal cover of the chemical vapor deposition wafer carrier with thermal cover, shown separately for ease of illustration.

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Claims

1 · 1 independent · depth 1

1 granted claims

›1.independentThe ornamental design for a chemical vapor deposition wafer carrier with thermal cover, as shown and described.

Classifications

1 codes

USPC · US Patent Classification

D13/182

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Pendency

1.4 y

526 days filing → grant

Office actions

non-final + final

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Examiner

Elizabeth J Oswecki

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