Target profile for a physical vapor deposition chamber target
Granted 25 Dec 2018 · 2 office actions
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Martin Lee Riker, Fuhong Zhang, Xiaodong Wang · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
8 dated eventsDescription
1 parts›FIG. 1 is a perspective view of a…
FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a right side elevation view thereof;
FIG. 5 is a left side elevation view thereof;
FIG. 6 is a front elevation view thereof;
FIG. 7 is a back elevation view thereof; and,
FIG. 8 is a cross-sectional view taken along line 8 - 8 of FIG. 2 .
The dashed lines in FIGS. 1-8 represent disclaimed matter that forms no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
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6 members · 3 offices›IP5 & PCT — 4 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D836572-S | S1 | 25 Dec 2018 | 30 Sep 2016 | granted | Target profile for a physical vapor deposition chamber target |
| US | US-D869409-S | S1 | 10 Dec 2019 | 30 Nov 2018 | granted | Target profile for a physical vapor deposition chamber target |
| JP | JP-1596742-S | S | 5 Feb 2018 | 29 Mar 2017 | granted | no title held |
| JP | JP-1599074-S | S | 5 Mar 2018 | 29 Mar 2017 | granted | no title held |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D188898-S | S | 1 Mar 2018 | 17 Mar 2017 | published | Target profile for a physical vapor deposition chamber target |
| TW | TW-D191626-S | S | 11 Jul 2018 | 17 Mar 2017 | published | Target profile for a physical vapor deposition chamber target |
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