USPatentGranted
S1

Target profile for a physical vapor deposition chamber target

Granted 25 Dec 2018 · 2 office actions

Application
29/579,470
filed 30 Sep 2016
Publication
Not published
not published
Patent· this page
US D836572
granted 25 Dec 2018

Life of the patent

8 dated events
⤢ drag to zoom20162018202020222024202620282030203220342036ProsecutionOwnershipTerm & fees
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Description

1 parts
›FIG. 1 is a perspective view of a…

FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a front elevation view thereof;

FIG. 7 is a back elevation view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8 - 8 of FIG. 2 .

The dashed lines in FIGS. 1-8 represent disclaimed matter that forms no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D13/182

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File wrapper

⤢ drag to zoomOct 2016Jan 2017Apr 2017Jul 2017Oct 2017Jan 2018Apr 2018Jul 2018Oct 2018Jan 2019USPTOApplicantRestriction requirementNon-final rejectionResponse after non-finalNotice of allowance
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Pendency
2.2 y
816 days filing → grant
Office actions
1
after a restriction
Responses
1
no RCE
Examiner
Elizabeth J Oswecki
art unit 2912 · TC 2900
Citations: 26 back · 0 forward

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Chain of title

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Term & fees

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Worldwide family

6 members · 3 offices
US2JP2TW2
this patentIP5 & PCTother officessolid = grantedhover for detail · click to open
Members
6
DOCDB simple family 61066246
Offices
3
US · JP
Granted
4 of 6
grant date present
›IP5 & PCT — 4 members
OfficePublicationKindPublishedFiledStatusTitle
USthis patentUS-D836572-SS125 Dec 201830 Sep 2016grantedTarget profile for a physical vapor deposition chamber target
USUS-D869409-SS110 Dec 201930 Nov 2018grantedTarget profile for a physical vapor deposition chamber target
JPJP-1596742-SS5 Feb 201829 Mar 2017grantedno title held
JPJP-1599074-SS5 Mar 201829 Mar 2017grantedno title held
›Other offices — 2 members
OfficePublicationKindPublishedFiledStatusTitle
TWTW-D188898-SS1 Mar 201817 Mar 2017publishedTarget profile for a physical vapor deposition chamber target
TWTW-D191626-SS11 Jul 201817 Mar 2017publishedTarget profile for a physical vapor deposition chamber target

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Citations

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