Pressing member for substrate polishing apparatus
Granted 20 Nov 2018 · no office action yet
Assignee: Ebara Corporation
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Satoru Yamamoto, Masayuki Nakanishi, Kenji Kodera, Yasuyuki Miyasawa +1 · Examiner: Patricia A Palasik · AU 2918 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›FIG. 1 is a first perspective view, observed…
FIG. 1 is a first perspective view, observed from a front of a first pressing member for a substrate polishing apparatus showing our new design;
FIG. 2 is a second perspective view, observed from a rear thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a rear view thereof;
FIG. 5 is a top view thereof;
FIG. 6 is a bottom view thereof;
FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof;
FIG. 8 is a first perspective view, observed from a front of a second pressing member for a substrate polishing apparatus showing our new design;
FIG. 9 is a second perspective view, observed from a rear thereof;
FIG. 10 is a front view thereof;
FIG. 11 is a rear view thereof;
FIG. 12 is a top view thereof;
FIG. 13 is a bottom view thereof;
FIG. 14 is a right-side view thereof, a left-side view being a mirror image thereof;
FIG. 15 is a first perspective view, observed from a front of a third pressing member for a substrate polishing apparatus showing our new design;
FIG. 16 is a second perspective view, observed from a rear thereof;
FIG. 17 is a front view thereof;
FIG. 18 is a rear view thereof;
FIG. 19 is a top view thereof;
FIG. 20 is a bottom view thereof;
FIG. 21 is a right-side view thereof, a left-side view being a mirror image thereof;
FIG. 22 is a first perspective view, observed from a front of a fourth pressing member for a substrate polishing apparatus showing our new design;
FIG. 23 is a second perspective view, observed from a rear thereof;
FIG. 24 is a front view thereof;
FIG. 25 is a rear view thereof;
FIG. 26 is a top view thereof;
FIG. 27 is a bottom view thereof; and,
FIG. 28 is a right-side view thereof, a left-side view being a mirror image thereof.
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