Large area substrate processor
Granted 14 Sep 2010 · 2 office actions
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Thomas L. Duer, John A. Miller · Examiner: Sandra Snapp · AU 2915 · TC 2900
Life of the patent
7 dated eventsDescription
1 parts›FIG. 1 is a top plan view of…
FIG. 1 is a top plan view of a processing system for processing large area substrates.
FIG. 2 is a front elevation of the processing system of FIG. 1 . The back elevation being the same as the front elevation.
FIGS. 3-4 are side views of the processing system of FIG. 1 .
FIG. 5 is a bottom view of the processing system of FIG. 1 ; and,
FIG. 6 is a perspective view of the processing system of FIG. 1 .
The present invention generally includes a vacuum processing system for processing large area substrates, such as flat panel displays (i.e., LCD, OLED, and other types of flat panel displays), solar panels, and the like.
The broken lines in the drawings depict unclaimed environmental subject matter.
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