USPatentGranted

Shield and cover for target of sputter coating apparatus

Granted 29 Dec 1998 · no office action yet

Current assignee: Semiconductor Equipment Technology, Inc · originally Semiconductor Equipment Technology

Inventors: Jose Luis Gonzalez, Andrew William Tudhope, David Bruce Jordan · Examiner: Antoine Duval Davis · AU 293 · TC 2900

Application

Not granted yet

filed 27 Jan 1998

Publication

Not published

not published

Patent· this page

US D403334

granted 29 Dec 1998

term adjustment not held

none

Litigation

checked

1 recorded conveyances

Life of the patent

4 dated events

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Description

1 parts

›FIG. 1 is a perspective view of a…

FIG. 1 is a perspective view of a shield and cover for target of sputter coating apparatus embodying the design of the invention;

FIG. 2 is a top plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 3 is a bottom plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 4 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the bottom of FIG. 2;

FIG. 5 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the top of FIG. 2;

FIG. 6 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the left side of FIG. 2;

FIG. 7 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the right side of FIG. 2;

FIG. 8 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 8--8 of FIG. 2; and,

FIG. 9 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 9--9 of FIG. 2.

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Claims

1 · 1 independent · depth 1

1 granted claims

›1.independentThe ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.

Classifications

1 codes

USPC · US Patent Classification

D15/138

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Pendency

0.9 y

336 days filing → grant

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on the grant's record

Examiner

Antoine Duval Davis

art unit 293 · TC 2900

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