Process chamber collimator

FIG. 1 is a top, front, left side isometric view of a process chamber collimator, showing our new design.

FIG. 2 is a top, rear, right side isometric view thereof.

FIG. 3 is a bottom, front, left side isometric view thereof.

FIG. 4 is a bottom, rear, right side isometric view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a rear elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof.

FIG. 9 is a top plan view thereof.

FIG. 10 is a bottom plan view thereof.

FIG. 11 is a cross-sectional view taken along line 11 - 11 in FIG. 9 .

FIG. 12 is a cross-sectional view taken along line 12 - 12 in FIG. 9 .

FIG. 13 is an enlarged portion view of an encircled portion labeled, “ FIG. 13 ” in FIG. 11 ; and,

FIG. 14 is an enlarged portion view of an encircled portion labeled, “ FIG. 14 ” in FIG. 11 .

The dot-dot-dashed broken lines shown in FIGS. 11 , 13 , and 14 illustrate the boundary lines of the enlarged portion views of FIGS. 13 and 14 and form no part of the claimed design. The even dashed broken lines shown in the drawings represent portions of the process chamber collimator that form no part of the claimed design.