Process chamber shower head
Granted 11 Nov 2025 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Jallepally Ravi, Manjunatha Koppa, Sandesh Yadamane, Shreyas Patil Shanthaveeraswamy +4 · Examiner: Elizabeth J Oswecki · AU 2926 · TC 2900
Life of the patent
3 dated eventsDescription
1 parts›FIG. 1 is a top, front, left side…
FIG. 1 is a top, front, left side isometric view of a process chamber shower head, showing our new design.
FIG. 2 is a bottom, rear, right side isometric view thereof.
FIG. 3 is a left side elevation view thereof.
FIG. 4 is a right side elevation view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a rear elevation view thereof.
FIG. 7 is a top plan view thereof.
FIG. 8 is a bottom plan view thereof.
FIG. 9 is an enlarged portion view taken from encircled portion, “ FIG. 9 ,” in FIG. 8 .
FIG. 10 is a cross-sectional view taken along line 10 - 10 in FIG. 7 ; and,
FIG. 11 is an enlarged portion view taken from encircled portion, “ FIG. 11 ,” in FIG. 7 .
The even dashed broken lines represent unclaimed environment and form no part of the claimed design. The dash-dot lines represent the boundary lines of the enlarged portion views of FIGS. 9 and 11 shown in FIGS. 7 , 8 , 9 and 11 and form no part of the claimed design.
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