Seal for an assembly in a vapor deposition chamber
Granted 14 May 2024 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Yao-Hung Yang, Philip Wayne Nagle, Scott Lin, Siamak Salimian +6 · Examiner: Keith J Wilson · AU 2925 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is top perspective view of a…
FIG. 1 is top perspective view of a seal for an assembly in a vapor deposition chamber.
FIG. 2 is a bottom perspective view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 3 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 4 is a bottom plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 5 is a front view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 6 is a rear view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 7 is a right side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 8 is a left side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 9 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
FIG. 10 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of a central segment of the seal.
FIG. 11 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
FIG. 12 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 2 showing details of an outer segment of the seal.
FIG. 13 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 showing details of a central segment of the seal.
FIG. 14 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 4 showing details of a central segment of the seal.
FIG. 15 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 6 showing details of an outer segment of the seal.
FIG. 16 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 7 showing details of an outer segment of the seal; and,
FIG. 17 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 shown in a portion of an assembly (in phantom).
The broken and phantom lines in the Figures illustrate unclaimed parts of the seal for an assembly in a vapor deposition chamber and form no part of the claimed design.
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D1027120-S | S1 | 14 May 2024 | 17 Dec 2020 | granted | Seal for an assembly in a vapor deposition chamber |
| JP | JP-1700651-S | S | 29 Nov 2021 | 17 Jun 2021 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D219455-S | S | 21 Jun 2022 | 17 Jun 2021 | published | 氣相沉積腔室中的密封件zh |
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