Lower shield for a substrate processing chamber

FIG. 1 is a top isometric view of a lower shield for a substrate processing chamber, according to the novel design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a right side elevation view thereof.

FIG. 7 is a left side elevation view thereof; and,

FIG. 8 is a cross-section view taken along line 8 - 8 in FIG. 2 .

The dashed lines in FIGS. 1-8 are for the purpose of showing environmental structure, and form no part of the claimed design.