Chamber inlet
Granted 13 Jul 2021 · 4 office actions
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Taewan Kim, Hansel Lo, Eric Kihara Shono, Tobin Kaufman-Osborn +3 · Examiner: Catherine S Posthauer · AU 2912 · TC 2900
Life of the patent
12 dated eventsDescription
1 parts›FIG. 1 is a top plan view of…
FIG. 1 is a top plan view of a chamber inlet showing our new design; and,
FIG. 2 is a top, right side perspective view of the chamber inlet of FIG. 1 , shown enlarged for clarity of disclosure.
The broken lines depict portions of the chamber inlet that form no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
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