Higher temperature vented susceptor
Granted 1 Jun 2021 · 2 office actions
Assignee: ASM International
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Sam Kim, Saket Rathi, Uday Kiran Rokkam, Dakai Bian · Examiner: Elizabeth J Oswecki · AU 2926 · TC 2900
Life of the patent
8 dated eventsDescription
1 parts›FIG. 1 is a front perspective view of…
FIG. 1 is a front perspective view of a higher temperature vented susceptor showing our new design;
FIG. 2 is a back perspective view thereof;
FIG. 3 is a left side view thereof; and,
FIG. 4 is a right side view thereof.
The dash-dash lines in FIGS. 1-4 form no part of the claimed design.
Claims
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3 members · 2 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D920936-S | S1 | 1 Jun 2021 | 17 Jan 2019 | granted | Higher temperature vented susceptor |
| US | US-D958764-S | S1 | 26 Jul 2022 | 4 May 2021 | granted | Higher temperature vented susceptor |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D206688-S | S | 21 Aug 2020 | 16 Jul 2019 | published | 通氣基座zh |
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