Seal member for use in semiconductor production apparatus
Granted 2 Feb 2021 · no office action yet
Assignee: Valqua, Ltd.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Ippei Nakagawa, Nobuhiro Yoshida · Examiner: Rhea Shields · AU 2915 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›1.1 is a perspective view of a seal…
1.1 is a perspective view of a seal member for use in semiconductor production apparatus, showing our new design in accordance with a first embodiment of the present invention;
1.2 is a front elevation view thereof;
1.3 is a rear elevation view thereof;
1.4 is a left side elevation view thereof;
1.5 is a right side elevation view thereof;
1.6 is a top view thereof;
1.7 is a bottom view thereof;
1.8 is a cross-sectional view thereof;
1.9 is an enlarged cross-sectional view of a portion thereof;
1.10 is an enlarged cross-sectional view thereof in a condition of use.
2.1 is a perspective view of a seal member for use in semiconductor production apparatus, showing our new design in accordance with a second embodiment of the present invention;
2.2 is a front elevation view thereof;
2.3 is a rear elevation view thereof;
2.4 is a left side elevation view thereof;
2.5 is a right side elevation view thereof;
2.6 is a top view thereof;
2.7 is a bottom view thereof;
2.8 is a cross-sectional view thereof;
2.9 is an enlarged cross-sectional view of a portion thereof; and
2.10 is an enlarged cross-sectional view thereof in a condition of use.
In the Reproductions 1.10 and 2.10 , the broken lines are for the purpose of illustrating portions of the seal member for use in semiconductor production apparatus that forms no part of the claimed design.
Claims
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