Plasma outlet liner
Granted 10 Mar 2020 · no office action yet
Assignee: Applied Materials, Inc.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Dongming Iu, Kartik Shah, Yanjun Xia · Examiner: Brett Miller · AU 2924 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is an isometric top view of…
FIG. 1 is an isometric top view of a plasma outlet liner showing our new design.
FIG. 2 is an isometric bottom view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a side elevational view thereof, with the opposite side being a mirror image thereof;
FIG. 5 is a bottom plan view thereof.
FIG. 6 is an end elevational view thereof, with the other end being a mirror image thereof;
FIG. 7 is a cross-sectional view thereof taken along lines 7 - 7 of FIG. 6 ; and,
FIG. 8 is a cross-sectional view thereof taken along lines 8 - 8 of FIG. 5 .
Claims
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