Chemical vapor deposition wafer carrier with thermal cover

FIG. 1 is a perspective view of a chemical vapor deposition wafer carrier with thermal cover, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a right side view thereof, the left side view, front view, and rear view being identical;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is an exploded view thereof, with portions of the thermal cover elevated from the remainder of the chemical vapor deposition wafer carrier with thermal cover;

FIG. 6 is a bottom perspective view thereof; and,

FIG. 7 is an enlarged portion view taken from encircled portion labeled FIG. 7 in FIG. 5 .

The dashed-dot lines depict the boundary of the enlarged portion view of FIG. 7 and form no part of the claimed design.