Collimator for a physical vapor deposition chamber

FIG. 1 is a top perspective view of a first embodiment of a collimator for a physical vapor deposition chamber, showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a left side elevation view thereof;

FIG. 7 is a front elevation view thereof;

FIG. 8 is a back elevation view thereof;

FIG. 9 is a cross sectional view taken along line 9 - 9 in FIG. 3 ;

FIG. 10 is a cross sectional view taken along line 10 - 10 in FIG. 3 ;

FIG. 11 is a top perspective view of a second embodiment of a collimator for a physical vapor deposition chamber, showing our new design;

FIG. 12 is a bottom perspective view thereof;

FIG. 13 is a top plan view thereof;

FIG. 14 is a bottom plan view thereof;

FIG. 15 is a right side elevation view thereof;

FIG. 16 is a left side elevation view thereof;

FIG. 17 is a front elevation view thereof;

FIG. 18 is a back elevation view thereof;

FIG. 19 is a cross sectional view taken along line 19 - 19 in FIG. 13 ; and,

FIG. 20 is a cross sectional view taken along line 20 - 20 in FIG. 13 .

The dashed lines in the drawings represent unclaimed environment and form no part of the claimed design.