Electrode cover for a plasma processing apparatus
Granted 12 Feb 2019 · 2 office actions
Current assignee: Hitachi High-Tech Instruments Co., Ltd · originally Hitachi, Ltd.
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Attorney: Attorney · Log in to unlock
Inventors: Takamasa Ichino, Kohei Sato, Kazunori Nakamoto · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
8 dated eventsDescription
1 parts›This application contains subject matter related to the…
This application contains subject matter related to the following co-pending U.S. design patent applications:
Application Ser. No. 29/610,995, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;
Application Ser. No. 29/610,998, filed herewith and entitled “Ring for a Plasma Processing Apparatus”;
Application Ser. No. 29/610,999, filed herewith and entitled “Cover Ring for a Plasma Processing Apparatus”; and
Application Ser. No. 29/611,001, filed herewith and entitled “Discharge Chamber for a Plasma Processing Apparatus”.
FIG. 1 is a front, top and right side perspective view of an electrode cover for a plasma processing apparatus, showing our new design;
FIG. 2 is a front, bottom and right side perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a top plan view thereof;
FIG. 8 is a bottom plan view thereof;
FIG. 9 is a cross-sectional view taken along line 9 - 9 of FIG. 3 ; and,
FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 9 .
The box labeled FIG. 10 in FIG. 9 is shown in broken lines and forms no part of the claimed design.
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D840364-S | S1 | 12 Feb 2019 | 18 Jul 2017 | granted | Electrode cover for a plasma processing apparatus |
| JP | JP-1584906-S | S | 28 Aug 2017 | 31 Jan 2017 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D186395-S | S | 1 Nov 2017 | 17 Mar 2017 | published | 電漿處理裝置用保護環zh |
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