USPatentGranted
S1

Pressing member for substrate polishing apparatus

Granted 20 Nov 2018 · no office action yet

Assignee: Ebara Corporation

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Attorney: Attorney · Log in to unlock

Inventors: Satoru Yamamoto, Masayuki Nakanishi, Kenji Kodera, Yasuyuki Miyasawa +1 · Examiner: Patricia A Palasik · AU 2918 · TC 2900

Application
29/592,889
filed 3 Feb 2017
Publication
Not published
not published
Patent· this page
US D834075
granted 20 Nov 2018

Life of the patent

6 dated events
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Description

1 parts
›FIG. 1 is a first perspective view, observed…

FIG. 1 is a first perspective view, observed from a front of a first pressing member for a substrate polishing apparatus showing our new design;

FIG. 2 is a second perspective view, observed from a rear thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a rear view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a bottom view thereof;

FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof;

FIG. 8 is a first perspective view, observed from a front of a second pressing member for a substrate polishing apparatus showing our new design;

FIG. 9 is a second perspective view, observed from a rear thereof;

FIG. 10 is a front view thereof;

FIG. 11 is a rear view thereof;

FIG. 12 is a top view thereof;

FIG. 13 is a bottom view thereof;

FIG. 14 is a right-side view thereof, a left-side view being a mirror image thereof;

FIG. 15 is a first perspective view, observed from a front of a third pressing member for a substrate polishing apparatus showing our new design;

FIG. 16 is a second perspective view, observed from a rear thereof;

FIG. 17 is a front view thereof;

FIG. 18 is a rear view thereof;

FIG. 19 is a top view thereof;

FIG. 20 is a bottom view thereof;

FIG. 21 is a right-side view thereof, a left-side view being a mirror image thereof;

FIG. 22 is a first perspective view, observed from a front of a fourth pressing member for a substrate polishing apparatus showing our new design;

FIG. 23 is a second perspective view, observed from a rear thereof;

FIG. 24 is a front view thereof;

FIG. 25 is a rear view thereof;

FIG. 26 is a top view thereof;

FIG. 27 is a bottom view thereof; and,

FIG. 28 is a right-side view thereof, a left-side view being a mirror image thereof.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D15/126

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File wrapper

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Pendency
1.8 y
655 days filing → grant
Office actions
0
after a restriction
Examiner
Patricia A Palasik
art unit 2918 · TC 2900
Citations: 31 back · 0 forward

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Chain of title

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Citations

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