Susceptor for semiconductor substrate processing apparatus

FIG. 1 is a perspective view of a susceptor for semiconductor substrate processing apparatus, showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a rear perspective view thereof; and,

FIG. 9 is a sectional view taken along line 9 - 9 of FIG. 6 .