Gas supply nozzle
Granted 11 Sep 2018 · no office action yet
Current assignee: Kokusai Electric Co. Ltd. · originally Hitachi, Ltd.
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Attorney: Attorney · Log in to unlock
Inventors: Yuma Fujii, Yuji Takebayashi, Kazuki Nonomura, Kenichi Suzaki +2 · Examiner: Sheryl L Lane · AU 2919 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›FIG. 1 is a front, bottom and left…
FIG. 1 is a front, bottom and left side perspective view of a gas supply nozzle showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof; and
FIG. 7 is a bottom plan view thereof.
FIG. 8 is an enlarged right side elevational view of FIG. 5 thereof;
FIG. 9 is an enlarged portion view take long line 9 - 9 in FIG. 2 thereof;
FIG. 10 is an enlarged portion view take long line 10 - 10 in FIG. 2 thereof; and,
FIG. 11 is a cross-sectional view taken along lines 11 - 11 in FIG. 10 .
The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the gas supply nozzle that form no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D828091-S | S1 | 11 Sep 2018 | 26 Jul 2016 | granted | Gas supply nozzle |
| JP | JP-1563647-S | S | 21 Nov 2016 | 29 Jan 2016 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D183003-S | S | 11 May 2017 | 27 Jul 2016 | published | 基板處理裝置用氣體供給噴嘴之部分zh |
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