USPatentGranted
S1

Target profile for a physical vapor deposition chamber target

Granted 14 Aug 2018 · no office action yet

Current assignee: Applied Materials Israel · originally Applied Materials, Inc.

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Inventors: Ryan Hanson, Vivek Gupta, Zhenbin Ge · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900

Application
29/618,685
filed 22 Sep 2017
Publication
Not published
not published
Patent· this page
US D825505
granted 14 Aug 2018

Life of the patent

2 dated events
⤢ drag to zoomOct 2017Jan 2018Apr 2018Jul 2018Oct 2018Prosecution
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Description

1 parts
›FIG. 1 is a perspective view of a…

FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side plan view thereof;

FIG. 5 is a left side plan view thereof;

FIG. 6 is a front view thereof;

FIG. 7 is a back view thereof; and,

FIG. 8 is a cross sectional view taken along line 8 - 8 in FIG. 2 .

The dashed lines in FIGS. 1-8 represent disclaimed matter forming no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D13/182

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File wrapper

Pendency
0.9 y
326 days filing → grant
Office actions
0
none on record
Examiner
Elizabeth J Oswecki
art unit 2912 · TC 2900
Citations: 14 back · 0 forward

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Chain of title

⤢ drag to zoom20182020202220242026202820302032203420362038Owner 1
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Worldwide family

6 members · 3 offices
US2JP2TW2
this patentIP5 & PCTother officessolid = grantedhover for detail · click to open
Members
6
DOCDB simple family 58645688
Offices
3
US · JP
Granted
4 of 6
grant date present
›IP5 & PCT — 4 members
OfficePublicationKindPublishedFiledStatusTitle
USUS-D798248-SS126 Sep 201718 Jun 2015grantedTarget profile for a physical vapor deposition chamber target
USthis patentUS-D825505-SS114 Aug 201822 Sep 2017grantedTarget profile for a physical vapor deposition chamber target
JPJP-1575842-SS8 May 201717 Dec 2015grantedno title held
JPJP-1577905-SS5 Jun 201717 Dec 2015grantedno title held
›Other offices — 2 members
OfficePublicationKindPublishedFiledStatusTitle
TWTW-D180764-SS11 Jan 201718 Dec 2015publishedPortion of a physical vapor deposition chamber target
TWTW-D181803-SS11 Mar 201718 Dec 2015publishedPortion of a physical vapor deposition chamber target

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Citations

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