Self-centering wafer carrier for chemical vapor deposition
Granted 5 Jun 2018 · 2 office actions
Current assignee: HSBC BANK USA, NATIONAL ASSOCIATION · originally Veeco Instruments
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Attorney: Attorney · Log in to unlock
Inventors: Sandeep Krishnan, Earl Marcelo, Alexander I. Gurary, Chenghung Paul Chang · Examiner: Jeffrey D Asch · AU 2917 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a first embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;
FIG. 2 is a bottom perspective view of the first embodiment thereof;
FIG. 3 is a top view of the first embodiment thereof;
FIG. 4 is a bottom view of the first embodiment thereof;
FIG. 5 is a right view of the first embodiment thereof;
FIG. 6 is a left view of the first embodiment thereof;
FIG. 7 is a rear view of the first embodiment thereof; and
FIG. 8 is a front view of the first embodiment thereof.
FIG. 9 is a top perspective view of a second embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;
FIG. 10 is a bottom perspective view of the second embodiment thereof;
FIG. 11 is a top view of the second embodiment thereof;
FIG. 12 is a bottom view of the second embodiment thereof;
FIG. 13 is a right view of the second embodiment thereof;
FIG. 14 is a left view of the second embodiment thereof;
FIG. 15 is a rear view of the second embodiment thereof; and
FIG. 16 is a front view of the second embodiment thereof.
FIG. 17 is a cross sectional view of the second embodiment taken along 17 - 17 in FIG. 11 thereof.
FIG. 18 is a top perspective view of a third embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;
FIG. 19 is a bottom perspective view of the third embodiment thereof;
FIG. 20 is a top view of the third embodiment thereof;
FIG. 21 is a bottom view of the third embodiment thereof;
FIG. 22 is a right view of the third embodiment thereof;
FIG. 23 is a left view of the third embodiment thereof;
FIG. 24 is a rear view of the third embodiment thereof; and,
FIG. 25 is a front view of the third embodiment thereof.
Claims
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6 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D819580-S | S1 | 5 Jun 2018 | 1 Apr 2016 | granted | Self-centering wafer carrier for chemical vapor deposition |
›Other offices — 5 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D183206-S | S | 21 May 2017 | 14 Apr 2016 | published | Wafer carrier for deposition |
| TW | TW-D183207-S | S | 21 May 2017 | 14 Apr 2016 | published | Wafer carrier for deposition |
| TW | TW-D183208-S | S | 21 May 2017 | 14 Apr 2016 | published | Wafer carrier for deposition |
| TW | TW-D186208-S | S | 21 Oct 2017 | 14 Apr 2016 | published | Wafer carrier for deposition |
| TW | TW-D186209-S | S | 21 Oct 2017 | 14 Apr 2016 | published | Wafer carrier for deposition |
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