Heat reflector for substrate processing apparatus

FIG. 1 is a front and top perspective view of a heat reflector for substrate processing apparatus showing my new design;

FIG. 2 is a front and bottom perspective view of a heat reflector for substrate processing apparatus showing my new design;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a cross sectional view take along line 6 - 6 in FIG. 5 thereof;

FIG. 7 is a cross sectional view take along line 7 - 7 in FIG. 5 thereof;

FIG. 8 is an enlarged portion view of the area outlined by the dash-dot-dot-dash lines in FIG. 2 ;

FIG. 9 is an enlarged portion view of the area outlined by the dash-dot-dot-dash lines in FIG. 6 ; and,

FIG. 10 is an enlarged portion view of the area outlined by the dash-dot-dot-dash lines in FIG. 7 .

The broken lines shown in the drawings represent portions of the heat reflector for substrate processing apparatus that form no part of the claimed design.

The dash-dot-dot-dash lines outline areas shown enlarged in other figures and form no part of the claim.

As the rear view, right side view and left side view is identical to the front view, it is omitted.