Target profile for a physical vapor deposition chamber target
Granted 26 Sep 2017 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Vivek Gupta, Zhenbin Ge, Ryan Hanson · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a perspective view of a…
FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a front view thereof;
FIG. 7 is a back view thereof; and,
FIG. 8 is a cross sectional view taken along line 8 - 8 in FIG. 2 .
The dashed lines in FIGS. 1-8 represent disclaimed matter forming no part of the claimed design.
Claims
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6 members · 3 offices›IP5 & PCT — 4 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D798248-S | S1 | 26 Sep 2017 | 18 Jun 2015 | granted | Target profile for a physical vapor deposition chamber target |
| US | US-D825505-S | S1 | 14 Aug 2018 | 22 Sep 2017 | granted | Target profile for a physical vapor deposition chamber target |
| JP | JP-1575842-S | S | 8 May 2017 | 17 Dec 2015 | granted | no title held |
| JP | JP-1577905-S | S | 5 Jun 2017 | 17 Dec 2015 | granted | no title held |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D180764-S | S | 11 Jan 2017 | 18 Dec 2015 | published | Portion of a physical vapor deposition chamber target |
| TW | TW-D181803-S | S | 11 Mar 2017 | 18 Dec 2015 | published | Portion of a physical vapor deposition chamber target |
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