Heater block
Granted 24 Mar 2015 · no office action yet
Assignee: ASM International
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Takayuki Yamagishi, Kazuo Sato, Naoto Tsuji · Examiner: Eric Goodman · AU 2919 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a top view of a…
FIG. 1 is a top view of a first embodiment of a heater block in accordance with our design;
FIG. 2 is a front view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a cross-section thereof taken along line 4 - 4 of FIG. 1 ;
FIG. 5 is a top view of a second embodiment of a heater block in accordance with our design;
FIG. 6 is a front view thereof;
FIG. 7 is a right side view thereof;
FIG. 8 is a left side view thereof;
FIG. 9 is a back view thereof;
FIG. 10 is a bottom view thereof; and,
FIG. 11 is cross-section thereof taken along line 11 - 11 of FIG. 5 .
The broken lines illustrate portions of the heater block which form no part of the claimed design.
Claims
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