Lower chamber liner
Granted 28 Oct 2014 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Shu-Kwan Lau, Mehmet Tugrul Samir, Anzhong Chang, Paul Brillhart +1 · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a lower chamber liner showing our new design;
FIG. 2 is another top perspective view thereof;
FIG. 3 is a bottom perspective view thereof;
FIG. 4 is another bottom perspective view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a side view thereof;
FIG. 8 is another side view thereof;
FIG. 9 is another side view thereof;
FIG. 10 is a cross sectional view taken along line 10 - 10 in FIG. 5 ;
FIG. 11 is an enlarged portion view taken along lines 11 - 11 in FIG. 10 ; and,
FIG. 12 is an enlarged portion view taken along lines 12 - 12 in FIG. 10 .
The broken lines in the figures form no part of the claimed design.
The upper chamber liner is shown broken away in FIGS. 11 and 12 to indicate that no particular length is claimed.
All surfaces not shown, form no part of the claimed design.
Claims
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