Wafer carrier having pockets
Granted 1 Oct 2013 · no office action yet
Current assignee: HSBC BANK USA, NATIONAL ASSOCIATION · originally Veeco Instruments
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Inventors: Chenghung Paul Chang, Keng Moy, Alexander I. Gurary · Examiner: Selina Sikder · AU 2912 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a wafer carrier having pockets showing our new design;
FIG. 2 is an enlarged view of a portion of FIG. 1 ;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom perspective view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is an enlarged view of a portion of FIG. 4 ; and,
FIG. 7 is a right side view thereof, the left side, front, and rear views being the same as the right side view.
The broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.
The dash-dot broken lines define the area corresponding to the enlarged portion shown in FIGS. 2 and 6 and form no part of the claimed design.
Claims
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