Pedestal cover
Granted 4 Dec 2012 · no office action yet
Current assignee: Novellus Systems, Inc. · originally Lam Research
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Attorney: Attorney · Log in to unlock
Inventors: Natan Solomon, Ivelin Angelov, Brian Severson · Examiner: Selina Sikder · AU 2912 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a perspective view of a…
FIG. 1 is a perspective view of a pedestal cover illustrating a platen facing surface having two retaining posts and one guiding post in our new design;
FIG. 2 is a perspective view thereof illustrating a substrate facing surface having six Minimum Contact Area (MCA) supports;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a front view thereof, the bottom view being an identical image thereof; and,
FIG. 6 is a right view thereof, the left view being an identical image thereof.
Claims
1 · 1 independent · depth 1Classifications
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D671901-S | S1 | 4 Dec 2012 | 13 Apr 2011 | granted | Pedestal cover |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D146230-S | S | 1 Apr 2012 | 18 May 2011 | published | Pedestal covers |
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