Liner for plasma processing apparatus
Granted 1 May 2012 · no office action yet
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Masakazu Ban, Kouki Suzuki, Jun Yamashita, Atsushi Ueda · Examiner: Patricia Palasik · AU 2915 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a front view of a…
FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a sectional view taken along line 5 - 5 of FIG. 2 thereof; and,
FIG. 6 is a perspective view thereof.
Claims
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D658693-S | S1 | 1 May 2012 | 7 Sep 2011 | granted | Liner for plasma processing apparatus |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D156030-S | S | 11 Sep 2013 | 9 Sep 2011 | published | Liner for plasma processing apparatus |
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