Process chamber tray
Granted 6 Feb 2001 · no office action yet
Assignee: Applied Materials, Inc.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Daehwan D. Kim · Examiner: Antoine Duval Davis · AU 2913 · TC 2900
Life of the patent
4 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a process chamber tray of the present invention;
FIG. 2 is a perspective view showing one side of a process chamber tray of the present invention;
FIG. 3 is a perspective view showing another side of a process chamber tray of the present invention;
FIG. 4 is a perspective view showing the top of a process chamber tray of the present invention;
FIG. 5 is a perspective view showing the bottom of a process chamber tray of the present invention;
FIG. 6 is a perspective view showing the front end of a process chamber tray of the present invention; and,
FIG. 7 is a perspective view showing the back end of a process chamber tray of the present invention.
Claims
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