Wafer boat
Granted 1 Jul 1997 · no office action yet
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Hitoshi Kato, Hiroyuki Iwai, Katsutoshi Ishii · Examiner: Antoine Duval Davis · AU 293 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front view of a…
FIG. 1 is a front view of a first embodiment of a wafer boat showing our new design;
FIG. 2 is a rear view of the embodiment of FIG. 1;
FIG. 3 is a top view of the embodiment of FIG. 1;
FIG. 4 is a bottom view of the embodiment of FIG. 1;
FIG. 5 is a left side view of the embodiment of FIG. 1, the right side view being a mirror image and, therefore, not shown;
FIG. 6 is a cross sectional view of the embodiment of FIG. 1 on section line 6--6 in FIG. 1;
FIG. 7 is a cross sectional view of the embodiment of FIG. 1 on section line 7--7 in FIG. 3;
FIG. 8 is a front/top/right side perspective view of the embodiment of FIG. 1;
FIG. 9 is a front view of a second embodiment of a wafer boat showing our new design;
FIG. 10 is a rear view of the embodiment of FIG. 9;
FIG. 11 is a top view of the embodiment of FIG. 9;
FIG. 12 is a bottom view of the embodiment of FIG. 9;
FIG. 13 is a left side view of the embodiment of FIG. 9, the right side view being a mirror image and, therefore, not shown;
FIG. 14 is a cross sectional view of the embodiment of FIG. 9 on section line 14--14 in FIG. 9;
FIG. 15 is a cross sectional view of the embodiment of FIG. 9 on section line 15--15 in FIG. 11; and,
FIG. 16 is a front/top/right side perspective view of the embodiment of FIG. 9.
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