According to one embodiment, an electrostatic chuck comprises a mount plate, a first layer, and a second layer. The first layer includes a heater. The second layer is provided between the mount plate and the first layer. The second layer transmits heat from the heater to the mount plate. The second layer includes a compressive attachment portion. The compressive attachment portion is formed at the outer edge. The face on the mount plate side of the compressive attachment portion is compressed and attached to the mount plate. The face on the first layer side of the compressive attachment portion is compressed and attached to the first layer.

Claims

18 · 3 independent · depth 4

18 granted claims

›1.independentAn electrostatic chuck comprising:na mount plate on which a work is to be mounted;a first layer including a heater to supply heat to the work via the …+7

›2.↳ 1The electrostatic chuck according to claim 1, whereinnthe second layer includes a metal plate, andthe compressive attachment portion is part of the me…d2

›3.↳ 1The electrostatic chuck according to claim 1, whereinnthe first layer includes a heat insulating layer provided at an outer edge, andthe face on the f…d2

›4.↳ 1The electrostatic chuck according to claim 1, whereinnthe second layer includes a metal plate, a first adhesive portion that bonds the metal plate and…d2+3

›8.↳ 1The electrostatic chuck according to claim 1, whereinnthe second layer includes a metal plate, a first adhesive portion that bonds the metal plate and…d2

›9.independentA mount plate support of an electrostatic chuck which includes a mount plate on which a work is to be mounted, the mount plate support supporting the …+4

›14.independentA manufacturing method of an electrostatic chuck comprising:nbonding a second layer to a first layer including a heater; andbonding a mount plate on w…+4

›15.↳ 14The manufacturing method of the electrostatic chuck according to claim 14, whereinnthe outer edge of the second layer is formed of a metal member,the …d2

›16.↳ 14The manufacturing method of the electrostatic chuck according to claim 14, whereinnthe outer edge of the second layer is part of a metal plate include…d2

›17.↳ 14The manufacturing method of the electrostatic chuck according to claim 14, whereinna flow passage to fill an adhesive bond into is formed in the surfa…d2

›18.↳ 14The manufacturing method of the electrostatic chuck according to claim 14, whereinna flow passage to fill an adhesive bond into is formed in the surfa…d2

Classifications

4 codes

IPC · International Patent Classification

Section B — Performing operations; transporting

B32B37/12

Section H — Electricity

H01T23/00
H01L21/67
H01L21/683

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File wrapper

Pendency

1.9 y

698 days filing → grant

Office actions

non-final + final

Responses

1 RCE

Examiner

Dharti Patel

art unit 2836 · TC 2800

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Citations: 13 back · 0 forward

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Priority chain

1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20150043122 A1	12 Feb 2015

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