USPatentGranted
B2

Substrate cartridge, substrate-processing apparatus, substrate-processing system, substrate-processing method, control apparatus, and method of manufacturing display element

Granted 29 Dec 2015 · 2 office actions

Current assignee: NIKON CORPORATION · originally Nikon Corporation

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Attorney: Attorney · Log in to unlock

Inventors: Hideya Inoue · Examiner: Ramesh Patel · AU 2127 · TC 2100

Life of the patent

9 dated events
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Abstract

A substrate cartridge includes a cartridge main body that houses a substrate and an information-maintaining section that is housed in the cartridge main body and maintains information that includes at least specification information of specification values of the substrate housed in the cartridge main body.

Claims

67 · 4 independent · depth 6
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67 granted claims

Classifications

7 codes
IPC · International Patent Classification
Section B — Performing operations; transporting
  • B65G49/00
  • B65D25/38
  • B65D85/00
Section G — Physics
  • G06F19/00
Section H — Electricity
  • H05K13/00
  • H01L27/32
  • H01L51/00

Claim changes

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File wrapper

⤢ drag to zoomJul 2012Jan 2013Jul 2013Jan 2014Jul 2014Jan 2015Jul 2015Jan 2016USPTOApplicantNon-final rejectionResponse after non-finalRequest for continued examination
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Pendency
3.7 y
1,337 days filing → grant
Office actions
1
non-final + final
Responses
2
1 RCE
Examiner
Ramesh Patel
art unit 2127 · TC 2100
Citations: 56 back · 0 forward

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Term & fees

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Priority chain

1 priority documents
›Priority documents — 1
TypeDocumentDate
related publicationUS 20120215338 A123 Aug 2012

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Citations

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