Thin film transistor array substrate for digital photo-detector

A thin film transistor array substrate for a digital photo-detector, comprising:na plurality of gate lines to supply a scan signal;a plurality of data lines to output data, the data lines arranged in a direction crossing the gate lines, wherein cell regions are defined by the gate lines and the data lines;a photodiode in each of the cell regions to perform photoelectric conversion;a thin film transistor at each intersection between the gate lines and the data lines to output a photoelectric conversion signal from the photodiode to the data lines in response to a scan signal supplied by the gate lines; anda light-shielding layer over each channel region of the respective thin film transistors, each light-shielding layer electrically connected to the respective gate line,wherein the photodiode includes, in order, a first electrode, a semiconductor layer, and a second electrode; andwherein the light-shielding layer includes the same material as the first electrode of the photodiode.

A thin film transistor array substrate for a digital photo-detector, comprising:na substrate,a thin film transistor disposed on the substrate, the thin film transistor including a gate electrode, a source electrode, and a drain electrode;a first interlayer insulating film disposed over the substrate and the thin film transistor, the first interlayer insulating film defining a source contact hole on the source electrode;a first electrode of a photodiode on the interlayer insulating film such that the first electrode is connected to the source electrode through the source contact hole;a semiconductor layer of the photodiode disposed on the first electrode;a second electrode of the photodiode disposed on the semiconductor layer;a second interlayer insulating film disposed on the first interlayer insulating film and the second electrode of the photodiode, a gate contact hole being defined through the first and second interlayer insulating films over the gate line; anda light-shielding layer disposed on the second interlayer insulating film over a channel region of the thin film transistor such that the light-shielding layer is connected to the gate line through the gate contact hole.

A thin film transistor array substrate for a digital photo-detector, comprising:na substrate;a thin film transistor on the substrate, the thin film transistor including a gate electrode, a source electrode, and a drain electrode;a first interlayer insulating film disposed over the substrate and the thin film transistor, the first interlayer insulating film defining a source contact hole on the source electrode and defining a gate contact hole on the gate line;a first electrode of a photodiode disposed on the interlayer insulating film such that the first electrode is connected to the source electrode through the source contact hole;a light-shielding layer on the first interlayer insulating film over a channel region of the thin film transistor such that the light-shielding layer is connected to the gate line through the gate contact hole;a semiconductor layer of the photodiode disposed on the first electrode;a second electrode of the photodiode disposed on the semiconductor layer; anda second interlayer insulating film disposed on the first interlayer insulating film, the light-shielding layer, and the second electrode of the photodiode.