Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a bulk acoustic wave resonance unit and an anti-resonant frequency modifying unit to modify an anti-resonant frequency generated from the bulk acoustic wave resonance unit.

Claims

7 · 1 independent · depth 2

7 granted claims

›1.independentA bulk acoustic wave resonator (BAWR), comprising:na bulk acoustic wave resonance unit comprising a first electrode, a second electrode, and a piezoel…+6

›2.↳ 1The BAWR of claim 1, wherein the distance between the first electrode and the ground plane and the distance between the second electrode and the groun…d2

›3.↳ 1The BAWR of claim 1, wherein the ground plane comprises the same material that is included in the first electrode or the second electrode.d2

›4.↳ 1The BAWR of claim 1, wherein the distance between the ground plane and the first electrode is constant, such that a fringe capacitance component gener…d2

›5.↳ 1The BAWR of claim 1, wherein the anti-resonant frequency modifying unit is configured to modify the anti-resonant frequency based on a capacitance com…d2

›6.↳ 1The BAWR of claim 1, wherein a space between the bulk acoustic wave resonance unit and the ground plane is charged with a dielectric material.d2

›7.↳ 1The BAWR of claim 1, wherein the distance between the bulk acoustic wave resonance unit and the ground plane is determined based on a location in whic…d2

Classifications

2 codes

IPC · International Patent Classification

Section H — Electricity

H03H9/02
H03H9/13

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Pendency

3.6 y

1,323 days filing → grant

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Examiner

Jorge Salazar, Jr.

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1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20130033340 A1	7 Feb 2013

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