A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

Claims

20 · 2 independent · depth 4

20 granted claims

›1.independentA charged particle beam drawing apparatus comprising:na stage configured to support a specimen as a drawing target; andan airtight drawing chamber for…+9

›2.↳ 1The charged particle beam drawing apparatus according to claim 1, wherein on the basis of a thickness of the side wall and a thickness of the curved p…d2+3

›6.↳ 1The charged particle beam drawing apparatus according to claim 1, wherein a thickness of the curved portion is smaller than a thickness of each of the…d2+1

›8.↳ 1The charged particle beam drawing apparatus according to claim 1, wherein the plurality of support portions and the curved portion are formed integral…d2

›9.↳ 1The charged particle beam drawing apparatus according to claim 1, whereinnthe curved portion includes a through-hole in a symmetrical shape with respe…d2

›10.↳ 1The charged particle beam drawing apparatus according to claim 1, whereinnthe plurality of the support portions have an equal thickness, anda thicknes…d2

›11.independentA drawing chamber comprising an airtight housing configured to house a stage to support a specimen as a drawing target, whereinnthe housing is formed …+9

›12.↳ 11The drawing chamber according to claim 11, wherein on the basis of a thickness of the side wall and a thickness of the curved portion, a degree of cur…d2+3

›16.↳ 11The drawing chamber according to claim 11, wherein a thickness of the curved portion is smaller than a thickness of each of the plurality of support p…d2+1

›18.↳ 11The drawing chamber according to claim 11, wherein the plurality of support portions and the curved portion are formed integrally with the side wall.d2

›19.↳ 11The drawing chamber according to claim 11, whereinnthe curved portion includes a through-hole in a symmetrical shape with respect to the center of the…d2

›20.↳ 11The drawing chamber according to claim 11, whereinnthe plurality of the support portions have an equal thickness, anda thickness of the curved portion…d2

Classifications

3 codes

IPC · International Patent Classification

Section H — Electricity

H01J37/16
H01J37/317
H01J37/20

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Pendency

1.3 y

468 days filing → grant

Office actions

none on record

Examiner

Nicole Ippolito

art unit 2881 · TC 2800

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Priority chain

1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20150021495 A1	22 Jan 2015

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