An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

Claims

16 · 3 independent · depth 3

16 granted claims

›1.independentA system for removable attachment of an electrode to an inductively coupled plasma source, comprising:nan inductively coupled plasma source having a r…+10

›2.↳ 1The system of claim 1 wherein the interface layer comprises a thin layer of metal.d2+1

›4.↳ 1The system of claim 1 wherein the mounting ring and the source electrode comprise a metal that is resistant to the plasma environment and has a therma…d2+1

›6.↳ 1The system of claim 1 wherein the mounting ring is affixed to the interface layer by brazing.d2

›7.↳ 1The system of claim 1 wherein the source electrode is attached to the mounting ring using one or more fasteners.d2+1

›14.↳ 1The system of claim 1 in which the source electrode includes an aperture from which ions are extract, the aperture sized to provide a pumping barrier …d2+1

›15.↳ 1The system of claim 1 further comprising an extraction electrode positioned downstream of the source electrode.d2

›9.independentA system for removable attachment of an electrode to an inductively coupled plasma source, comprising:nan inductively coupled plasma source having a r…+2

›11.independentA system for removable attachment of an electrode to an inductively coupled plasma source, comprising:nan inductively coupled plasma source having a r…+1

Classifications

3 codes

IPC · International Patent Classification

Section H — Electricity

H01J1/02

USPC · US Patent Classification

313/39313/237

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Pendency

3.1 y

1,133 days filing → grant

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Examiner

Britt D Hanley

art unit 2889 · TC 2800

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Citations: 12 back · 0 forward

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1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20130134855 A1	30 May 2013

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