A substrate processing apparatus that simultaneously forms thin films on a plurality of substrates and performs heat treatment includes: a plurality of substrate holders, each including a substrate support that supports a substrate and a first gas pipe having one or a plurality of injection holes; a boat where the plurality of substrate holders are stacked and including a second gas pipe connected with the first gas pipe of each of the substrate holders; a process chamber providing a space in which the substrates stacked in the boat are processed; a conveying unit that carries the boat into/out of the process chamber; a first heating unit disposed outside the process chamber; and a gas supply unit including a third gas pipe connected with the second gas pipe and supplying a heated or cooled gas into the second gas pipe.

Claims

12 · 1 independent · depth 3

12 granted claims

›1.independentA substrate processing apparatus, comprising:na plurality of substrate holders, each substrate holder comprising a substrate support to support a subs…+11

›2.↳ 1The apparatus of claim 1, wherein each of the first gas pipes is disposed in one of the substrate supports.d2

›3.↳ 1The apparatus of claim 1, wherein the second gas pipe is disposed in the boat.d2

›4.↳ 1The apparatus of claim 1, wherein the connecting member is disposed between each of the first gas pipes and the second gas pipe.d2

›5.↳ 1The apparatus of claim 1, wherein each of the first gas pipes comprises nozzles disposed at the at least one injection hole at an angle with respect t…d2+1

›7.↳ 1The apparatus of claim 1, wherein the conveying unit comprises an insulating unit.d2+2

›10.↳ 1The apparatus of claim 1, wherein the process chamber comprises:na first tube to prevent external air from flowing to the substrates; anda manifold to…d2+1

›12.↳ 1The apparatus of claim 1, further comprising a shutter disposed under the process chamber.d2

Classifications

16 codes

IPC · International Patent Classification

Section C — Chemistry; metallurgy

C23C16/00
C23F1/00
C23C16/455
C23C16/46
C23C16/458

Section H — Electricity

H01L21/306
H01L21/673

USPC · US Patent Classification

118/724118/728156/345.32156/345.51156/345.34156/345.33156/345.3156/345.29118/715

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3.9 y

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Benjamin Kendall

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Type	Document	Date
related publication	US 20120000425 A1	5 Jan 2012

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