Miniature MEMS actuator assemblies

An electrostatic actuator, comprising:na generally planar fixed frame;a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame;a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame;an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.

A lens barrel assembly, comprising:na lens barrel having a plurality of flats distributed around a circumferential surface thereof and a central lumen containing at least one lens fixed concentrically therein;an actuator assembly, including:na flexible substrate having a central portion containing a central aperture and a plurality of arms radiating outwardly therefrom; anda plurality of one-degree-of-freedom (one-DOF) actuators, each actuator being mounted on a corresponding one of the arms of the substrate such that the actuator is spaced above the arm and electrically connected to conductive traces disposed on or within the arm, each actuator including an elongated output shaft having an output end with an output coupler disposed thereon; anda lens mounting platform containing a central aperture and having a plurality of arms extending tangentially therefrom, whereinthe central portion of the substrate is disposed over an upper end of the lens barrel,each of the arms of the substrate is folded down below the upper end of the lens barrel and attached to a corresponding one of the flats thereon,upper surfaces of respective ones of the output couplers of the actuators define a plane above the upper end of the lens barrel, andeach of the tangential arms of the lens mounting platform is attached to the upper surface of the output coupler of a corresponding one of the actuators.

A lens barrel assembly, comprising:na lens barrel having a plurality of flats distributed around a circumferential surface thereof and a central lumen containing at least one lens fixed concentrically therein;an actuator assembly, including:na flexible substrate having a central portion containing a central aperture and a plurality of arms radiating outwardly therefrom; anda plurality of two-degree-of-freedom (two-DOF) actuators, each actuator being mounted on a corresponding one of the arms of the substrate, each actuator including a pair of elongated output shafts having respective output ends coupled to an output coupler; anda lens mounting platform containing a central aperture and having a plurality of arms extending tangentially therefrom, whereinthe central portion of the substrate is disposed over an upper end of the lens barrel,each of the arms of the substrate is folded down below the upper end of the lens barrel and disposed on a corresponding one of the flats thereon,upper surfaces of respective ones of the output couplers of the actuators define a plane above the upper end of the lens barrel, andeach of the tangential arms of the lens mounting platform is attached to the upper surface of the output coupler of a corresponding one of the actuators.