Semiconductor device and method for manufacturing the same
Granted 15 Jul 2014 · no office action yet
Current assignee: Semiconductor Energy Laboratory Co., Ltd. · originally Semiconductor Energy Laboratory
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Inventors: Hideyuki Kishida, Takuya Hirohashi, Junichiro Sakata · Examiner: Robert Bachner
Life of the patent
7 dated eventsAbstract
It is an object to provide a highly reliable semiconductor device including a thin film transistor with stable electric characteristics. In a semiconductor device including an inverted staggered thin film transistor whose semiconductor layer is an oxide semiconductor layer, a buffer layer is provided over the oxide semiconductor layer. The buffer layer is in contact with a channel formation region of the semiconductor layer and source and drain electrode layers. A film of the buffer layer has resistance distribution. A region provided over the channel formation region of the semiconductor layer has lower electrical conductivity than the channel formation region of the semiconductor layer, and a region in contact with the source and drain electrode layers has higher electrical conductivity than the channel formation region of the semiconductor layer.
Claims
20 · 2 independent · depth 2Classifications
4 codes- H01L29/10
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1 priority documents›Priority documents — 1
| Type | Document | Date |
|---|---|---|
| related publication | US 20130299826 A1 | 14 Nov 2013 |
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