USPatentGranted
B2

Semiconductor device and method for manufacturing the same

Granted 15 Jul 2014 · no office action yet

Current assignee: Semiconductor Energy Laboratory Co., Ltd. · originally Semiconductor Energy Laboratory

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Inventors: Hideyuki Kishida, Takuya Hirohashi, Junichiro Sakata · Examiner: Robert Bachner

Life of the patent

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Abstract

It is an object to provide a highly reliable semiconductor device including a thin film transistor with stable electric characteristics. In a semiconductor device including an inverted staggered thin film transistor whose semiconductor layer is an oxide semiconductor layer, a buffer layer is provided over the oxide semiconductor layer. The buffer layer is in contact with a channel formation region of the semiconductor layer and source and drain electrode layers. A film of the buffer layer has resistance distribution. A region provided over the channel formation region of the semiconductor layer has lower electrical conductivity than the channel formation region of the semiconductor layer, and a region in contact with the source and drain electrode layers has higher electrical conductivity than the channel formation region of the semiconductor layer.

Claims

20 · 2 independent · depth 2
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20 granted claims

Classifications

4 codes
IPC · International Patent Classification
Section H — Electricity
  • H01L29/10
USPC · US Patent Classification
257/43438/158257/66

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File wrapper

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Pendency
1.0 y
362 days filing → grant
Office actions
0
none on record
Responses
0
1 RCE
Examiner
Robert Bachner
art unit —
Citations: 317 back · 0 forward

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Priority chain

1 priority documents
›Priority documents — 1
TypeDocumentDate
related publicationUS 20130299826 A114 Nov 2013

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