A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

Claims

10 · 1 independent · depth 3

10 granted claims

›1.independentA method for processing metal bearing gases, the method comprising:nreceiving a metal bearing gas in a plasma chamber at a pressure via an inlet to th…+9

›2.↳ 1The method of claim 1, comprising providing at least a second gas to the plasma chamber.d2+1

›4.↳ 1The method of claim 1, further comprising collecting the at least one of a metallic material, a metal oxide material or a metal nitride material via t…d2

›5.↳ 1The method of claim 1, wherein the collecting step comprises filtering the at least one of a metallic material, a metal oxide material or a metal nitr…d2

›6.↳ 1The method of claim 1, wherein the device is disposed external to the plasma chamber.d2

›7.↳ 1The method of claim 1, wherein the device is a replaceable portion of the plasma chamber.d2

›8.↳ 1The method of claim 1, wherein the device is selected from the group consisting of a filter, a particle trap, a cyclone trap or an electrostatic trap.d2

›9.↳ 1The method of claim 1, further comprising outputting the at least one of a metallic material, a metal oxide material or a metal nitride material via a…d2

›10.↳ 1The method of claim 1, further comprising filtering the at least one of a metallic material, a metal oxide material or a metal nitride material via th…d2

Classifications

6 codes

IPC · International Patent Classification

Section B — Performing operations; transporting

B23K10/00

Section H — Electricity

H01H1/34

USPC · US Patent Classification

219/121.41219/121.43219/121.59219/121.52

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Pendency

2.2 y

795 days filing → grant

Office actions

non-final + final

Responses

no RCE

Examiner

Mark Paschall

art unit 3742 · TC 3700

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Citations: 409 back · 0 forward

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Priority chain

2 priority documents

Priority

8 Nov 2004

earliest claimed

›Priority documents — 2

Type	Document	Date
provisional	US 60625838	8 Nov 2004
related publication	US 20120160059 A1	28 Jun 2012

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